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of Gases in Liquids. 20. Solubility of He, Ne, Ar, Kr, N2,

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Neutral gas temperature ( T g ) is measured in an industrial high-density inductively coupled etch reactor operating in C F 4 , S F 6 , O 2 ,

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The design and use of equipment and installations applying SF6 gas or SF6/CF4 gas mixtures have been considered in Sect.  12.2and Part C of this

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Solubility of Gases in Liquids. 21. Solubility of He, Ne, Ar, Kr, N2, O2, CH4, CF4, and SF6 in 2,2,4-Trimethylpentane at

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"Solubility of Gases in Liquids. 17. The Solubility of He, Ne

Solubility of Gases in Liquids. 17. The Solubility of He, Ne, Ar, Kr, H2, N2, O2, CO, CH4, CF4, and SF6 in Tetrachloromethane at 283-318

for remote sensing of greenhouse gases CH4, CF4 and SF6

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SF6/CF4 Mixtures in Test Chamber and 25.8kV GIS Shin-Woo Park, Chung- SF6 gas has excellent dielectric strength, but it causes global warming